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Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs.

Qianbo LuJian BaiKaiwei WangPeiwen ChenWeidong FangChen Wang
Published in: Sensors (2018)
Keyphrases
  • single chip
  • low power
  • low cost
  • highly parallel
  • embedded processors
  • pairwise
  • image sensor
  • cmos image sensor
  • image restoration
  • high speed