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A Cluster-Based Method for Quantitative Characterization and Uncertainty Evaluation of Areal Step Height in Structured Surface Metrology.
Chen Wang
Xianyu Meng
Grzegorz Królczyk
Heming Wei
Published in:
IEEE Trans. Instrum. Meas. (2022)
Keyphrases
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high accuracy
objective function
computational complexity
pairwise
significant improvement
cost function
segmentation method
evaluation method
data sets
similarity measure
multiscale
preprocessing
clustering method
high precision