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A fuzzy approach for performance modeling in a batch plant: application to semiconductor manufacturing.

Catherine Azzaro-PantelPascal FloquetLuc PibouleauSerge Domenech
Published in: IEEE Trans. Fuzzy Syst. (1997)
Keyphrases
  • semiconductor manufacturing
  • discrete event simulation
  • control system
  • fuzzy logic
  • machine learning
  • evolutionary algorithm
  • membership functions
  • database
  • genetic algorithm
  • complex systems
  • fuzzy numbers