Login / Signup

A new on-chip test structure for real time fatigue analysis in polysilicon MEMS.

Giacomo LangfelderAntonio LongoniFederico ZaragaAlberto CoriglianoAldo GhisiA. Merassi
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • real time
  • high speed
  • databases
  • low cost
  • random access memory