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Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone.
Yanan Geng
Weirong Ren
Guojun Zhang
Peng Chen
Shan Zhu
Yifan Zhang
Yan Liu
Li Jia
Jie Zhang
Yansong Wang
Wendong Zhang
Published in:
IEEE Trans. Instrum. Meas. (2023)
Keyphrases
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