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Tool capacity planning in semiconductor manufacturing.
Bülent Çatay
S. Selçuk Erengüç
Asoo J. Vakharia
Published in:
Comput. Oper. Res. (2003)
Keyphrases
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semiconductor manufacturing
capacity planning
discrete event simulation
supply chain
stochastic programming
process control
data mining
computational complexity
dynamic programming
production system
capacity expansion
search space
sufficient conditions
supply chain management