A Scalable Deep Learning-Based Approach for Anomaly Detection in Semiconductor Manufacturing.
Simone TedescoGian Antonio SustoNatalie GentnerAndreas KyekYao YangPublished in: WSC (2021)
Keyphrases
- anomaly detection
- deep learning
- semiconductor manufacturing
- unsupervised learning
- intrusion detection
- anomalous behavior
- detecting anomalies
- process control
- network intrusion detection
- machine learning
- network anomaly detection
- network traffic
- intrusion detection system
- negative selection algorithm
- weakly supervised
- mental models
- semi supervised
- one class support vector machines
- text classification
- supervised learning
- knowledge discovery
- active learning
- information retrieval