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(Almost) present at the creation: 25 years of modelling and simulation in semiconductor manufacturing.
Reha Uzsoy
Published in:
WSC (2014)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
production system
computer vision
mathematical model
information technology
multi agent
simulation environment
years ago
real time
reinforcement learning
similarity measure
three dimensional
social networks
real world
neural network