• search
    search
  • reviewers
    reviewers
  • feeds
    feeds
  • assignments
    assignments
  • settings
  • logout

A comprehensive mathematical model to calculate polish time for oxide chemical mechanical process (CMP).

S. KumarT. K. GargV. P. Wani
Published in: Int. J. Manuf. Technol. Manag. (2011)
Keyphrases
  • mathematical model
  • mathematical models
  • ant colony algorithm
  • control strategy
  • computational intelligence
  • design process
  • real world
  • development process
  • feasible solution
  • fuzzy controller