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A comprehensive mathematical model to calculate polish time for oxide chemical mechanical process (CMP).

S. KumarT. K. GargV. P. Wani
Published in: Int. J. Manuf. Technol. Manag. (2011)
Keyphrases
  • mathematical model
  • mathematical models
  • ant colony algorithm
  • control strategy
  • computational intelligence
  • design process
  • real world
  • development process
  • feasible solution
  • fuzzy controller