True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor.

Jan Thiesler Thomas Ahbe Rainer Tutsch Gaoliang Dai

Published in: Sensors (2022)

Keyphrases

sensor networks
sensor data
real time
multi sensor
real world
wireless sensor networks
wireless sensor
machine learning
information retrieval
learning algorithm
search engine
data sets
database
sensor fusion
range sensors
sensor noise
vision sensor
fiber bragg grating