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Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface.
Shujie Liu
Shuichi Nagasawa
Satoru Takahashi
Kiyoshi Takamasu
Published in:
J. Robotics Mechatronics (2006)
Keyphrases
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case study
three dimensional
d objects
development process
rapid development
database
real time
software engineering
x ray
information processing
vector field
design principles