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Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface.

Shujie LiuShuichi NagasawaSatoru TakahashiKiyoshi Takamasu
Published in: J. Robotics Mechatronics (2006)
Keyphrases
  • case study
  • three dimensional
  • d objects
  • development process
  • rapid development
  • database
  • real time
  • software engineering
  • x ray
  • information processing
  • vector field
  • design principles