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Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath.
In-Ho Seong
Si-Jun Kim
Young-Seok Lee
Chul-Hee Cho
Jang-Jae Lee
Won-nyoung Jeong
Ye-Bin You
Shin-Jae You
Published in:
Sensors (2022)
Keyphrases
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monitoring system
real time
data acquisition
energy distribution
health monitoring
field bus
high energy
multiscale
low cost
subband
remote monitoring
control system
signal processing
subband decomposition
safe operation