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Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process.

Fu-Yun ZhuXiao-Sheng ZhangWei HuHaixia Zhang
Published in: NEMS (2013)
Keyphrases
  • machine learning
  • real time
  • databases
  • development process
  • evolution process
  • database
  • case study
  • process model
  • digital camera