Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools.
Neal G. PierceMichael J. DrevnaPublished in: WSC (1992)
Keyphrases
- simulation models
- simulation tools
- simulation model
- decision support
- wafer fabrication
- case study
- agent based simulation
- development environment
- software tools
- design principles
- development process
- programming environments
- hardware platforms
- design tools
- knowledge based systems
- simulation tool
- computer aided software engineering
- web technologies
- communication technologies
- data clustering
- computer aided
- electronic commerce
- domain specific
- software engineering