Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based on Pareto Optimization.

Yuanyuan Yan Qinghua Tao Huangang Wang Wenhui Fan

Published in: ICCAE (2021)

Keyphrases

multi type
multi type relational
data objects
multiple objectives
relational data
multi objective
scheduling problem
reverse nearest neighbor
data clustering
cost model
database
clustering algorithm
training data
relational databases
structured data
spectral clustering