Hybrid etching process and its application in thermopile infrared sensor.
Dehui XuBin XiongYuelin WangYinglei MaPublished in: NEMS (2010)
Keyphrases
- infrared
- multi sensor
- electro optical
- infrared images
- hyperspectral
- moving target detection
- time of flight
- focal plane
- visible spectrum
- infrared sensors
- target detection and tracking
- infrared imagery
- data fusion
- visible light
- automatic target recognition
- thermal imaging
- human computer interaction
- vision system
- infrared camera
- infrared image sequences
- real time