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High-Performance Ellipsometry With 2-D Expanded Channels for Spectroscopy and Polarization Analysis.

Huatian TuYuxiang ZhengYao ShanYao ChenHaotian ZhangPian LiuHaibin ZhaoRongjun ZhangSongyou WangJing LiHongzhu YuYoungPak LeeLiangyao Chen
Published in: IEEE Trans. Instrum. Meas. (2021)
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