Close-down process scheduling of wafer residence time-constrained multi-cluster tools.

Qinghua Zhu MengChu Zhou Yan Qiao Naiqi Wu

Published in: ICRA (2017)

Keyphrases

scheduling problem
database
data mining
hierarchical clustering
clustering algorithm
end users
data analysis
massively parallel
scheduling algorithm
process model
building blocks
control system
data streams
case study
metadata
artificial intelligence
data sets
real time