Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting.
Angzhi FanYu HuangFei XuSthitie BomPublished in: CoRR (2023)
Keyphrases
- regression model
- sensor networks
- support vector regression
- prediction model
- sensor fusion
- sensing devices
- regression analysis
- data acquisition
- sensor data
- semiconductor manufacturing
- model selection
- generalized linear models
- linear regression model
- camera calibration
- kernel regression
- multivariate regression
- regression methods
- process control
- logistic regression models
- forecasting model
- image sensor
- mobile sensor
- linear model
- gaussian process
- short term
- regression method
- integrated circuit
- explanatory variables
- interval valued data
- probability distribution
- bp neural network
- sensing modalities
- independent variables
- locally weighted
- multiple linear regression
- generalized linear
- survival analysis
- predictive model