Reduction of Dark Current in CMOS Image Sensor Pixels Using Hydrocarbon-Molecular-Ion-Implanted Double Epitaxial Si Wafers.
Ayumi Onaka-MasadaTakeshi KadonoRyosuke OkuyamaRyo HiroseKoji KobayashiAkihiro SuzukiYoshihiro KogaKazunari KuritaPublished in: Sensors (2020)
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