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Semiconductor manufacturing material handling systems: integrating dynamic fab capacity and automation models for 300mm semiconductor manufacturing.

Chad D. DeJongSeth A. Fischbein
Published in: WSC (2000)
Keyphrases
  • semiconductor manufacturing
  • discrete event simulation
  • production system
  • process control
  • material handling
  • complex systems
  • expert systems
  • modeling method
  • cyclic scheduling