A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation.
Sandeep S. SaseendranTangla D. KongnyuyBruno FigeysFederico BujaBenedetto TroiaSarp KermanAleksandrs MarininsRoelof JansenXavier RottenbergDeniz Sabuncuoglu TezcanPhilippe SoussanPublished in: OFC (2019)