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Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS.
Toshiyuki Tsuchiya
Hiroyuki Tokusaki
Yoshikazu Hirai
Koji Sugano
Osamu Tabata
Published in:
VLSI-SoC (Selected Papers) (2011)
Keyphrases
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linear programming
markov chain
cellular automata