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Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS.

Toshiyuki TsuchiyaHiroyuki TokusakiYoshikazu HiraiKoji SuganoOsamu Tabata
Published in: VLSI-SoC (Selected Papers) (2011)
Keyphrases
  • linear programming
  • markov chain
  • cellular automata