Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing.
Dongsik ParkYoungshin HanChilgee LeePublished in: ICCSA (5) (2006)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- process control
- global optimization
- discrete optimization
- optimization algorithm
- optimization process
- production system
- optimization problems
- simulation study
- optimization model
- simulation environment
- information systems
- simulation software
- design space exploration
- real time
- finite element model
- constrained optimization
- mathematical model
- supply chain
- information retrieval
- neural network