• search
    search
  • reviewers
    reviewers
  • feeds
    feeds
  • assignments
    assignments
  • settings
  • logout

In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile.

Jia HuShuwei HeYiming ZhangJing Chen
Published in: NEMS (2013)
Keyphrases
  • random variables
  • uniformly distributed
  • modeling language
  • modeling method