An electro-thermal SU-8 cantilever micro actuator based on bimorph effect.

Xiaobo Zhang Yibo Wu Xiaodan Miao Congchun Zhang Guifu Ding

Published in: NEMS (2010)

Keyphrases

learning algorithm
real world
control system
real time
infrared
closed loop
data mining
information systems
multiscale
multiresolution
hidden markov models
power plant