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A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process.
Henry C. W. Lau
Cassandra X. H. Tang
B. P. K. Leung
Carman K. M. Lee
George T. S. Ho
Published in:
IEEE Trans. Syst. Man Cybern. Part A (2009)
Keyphrases
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model selection
real world
machine learning
multiscale
expert systems
expectation maximization
artificial neural networks
maximum likelihood
parameter values
fine tuned