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A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process.

Henry C. W. LauCassandra X. H. TangB. P. K. LeungCarman K. M. LeeGeorge T. S. Ho
Published in: IEEE Trans. Syst. Man Cybern. Part A (2009)
Keyphrases
  • model selection
  • real world
  • machine learning
  • multiscale
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  • expectation maximization
  • artificial neural networks
  • maximum likelihood
  • parameter values
  • fine tuned