Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation.
Bo-Wei HsiehChun-Hung ChenShi-Chung ChangPublished in: IEEE Trans. Robotics Autom. (2001)
Keyphrases
- wafer fabrication
- dispatching rule
- simulation model
- optimization process
- metabolic engineering
- optimization algorithm
- global optimization
- simulation study
- real time
- mathematical model
- optimization model
- optimization problems
- optimization method
- resource allocation
- optimization methods
- simulation environment
- information systems
- neural network