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Optical Fiber MEMS Micro Pressure Sensor Based On Beam-membrane Structure.
Bian Tian
Kaikai Li
Zhongkai Zhang
Feng Han
Na Zhao
Qijing Lin
Zhuangde Jiang
Published in:
NEMS (2019)
Keyphrases
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optical fiber
high sensitivity
artificial intelligence
structural information
database
databases
genetic algorithm
information systems
multiscale
video sequences
sensor data
structural properties