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3D Geometric Simulation of MEMS Fabrication Processes: A Semantic Approach.

Hrishikesh DixitSrikanth KannapanDean L. Taylor
Published in: Symposium on Solid Modeling and Applications (1997)
Keyphrases
  • domain specific
  • semantic web
  • semantic information
  • database
  • natural language
  • mathematical model
  • computational models
  • electro mechanical systems
  • data sets
  • case study
  • multiscale
  • control system
  • semantic knowledge