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An Improved Meta Learning Approach for Optimizing Recipe Parameters for Semiconductor Processes.
Zhen-Yin Annie Chen
Chun-Cheng Lin
Ke-Wen Lu
Hui-Hsin Chin
Der-Jiunn Deng
Published in:
IECON (2023)
Keyphrases
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meta learning
hybrid systems
inductive learning
meta knowledge
learning tasks
machine learning algorithms
model selection
base classifiers
decision trees
data mining
feature selection
case study
database
databases
machine learning
support vector machine
training set
image segmentation
learning algorithm