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Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator.

Mohammad Tariq JanFarooq AhmadNor Hisham HamidMohd Haris M. KhirMuhammad ShoaibKhalid Ashraf
Published in: Microelectron. Reliab. (2016)
Keyphrases
  • relative humidity
  • solar radiation
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  • long term
  • infrared