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Design and simulation of polysilicon micro tuning fork for ultrasonic frequency operation.
Germán Quiroz-Merino
Rodolfo Sánchez-Fraga
Héctor Báez-Medina
Víctor Hugo Ponce Ponce
Salvador Mendoza-Acevedo
Published in:
CCE (2015)
Keyphrases
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design process
design considerations
low cost
multi dimensional