A multi-step supervisory control strategy for semiconductor device manufacturing.
Christopher A. HarrisonRichard GoodDaniel KadoshS. Joe QinPublished in: CDC (2004)
Keyphrases
- control strategy
- multi step
- semiconductor manufacturing
- control system
- semiconductor devices
- control algorithm
- control method
- control scheme
- mathematical model
- control strategies
- operating conditions
- wafer fabrication
- process control
- field effect transistors
- optimal control
- production line
- control law
- fuzzy logic control
- manufacturing systems
- knn
- single step
- force control
- semi supervised
- k nearest neighbor
- fuzzy logic
- speed control
- fuzzy controller
- pi controller
- transient response
- sliding mode control
- small number
- pid controller
- steady state
- mobile robot
- real time