A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing.
Tobias GentnerJohannes BreitenbachTimon NeitzelJacob SchulzeRicardo BuettnerPublished in: COMPSAC (2022)
Keyphrases
- literature review
- semiconductor manufacturing
- machine learning
- process control
- case study
- discrete event simulation
- control system
- fuzzy theory
- current issues
- information systems development
- public libraries
- information extraction
- computational intelligence
- machine learning algorithms
- higher education institutions
- design science
- control strategy
- data sets
- natural language processing
- knowledge discovery
- expert systems
- feature selection
- data mining
- real world