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Analysis of the Impurity Atom Distribution Near the Diffusion Mask for a Planar p-n Junction.

David P. KennedyRedmond R. O'Brien
Published in: IBM J. Res. Dev. (1965)
Keyphrases
  • impurity atom
  • diffusion process
  • diffusion processes
  • image analysis
  • anisotropic diffusion
  • diffusion equation