Adaptive Modelling for Anomaly Detection and Defect Diagnosis in Semiconductor Smart Manufacturing: A Domain-specific AutoML.
Weihong ZhaiXiupeng ShiZeng ZengPublished in: CIS-RAM (2023)
Keyphrases
- anomaly detection
- domain specific
- intrusion detection
- semiconductor manufacturing
- detecting anomalies
- anomalous behavior
- computer security
- network intrusion detection
- network anomaly detection
- network traffic
- intrusion detection system
- one class support vector machines
- behavior analysis
- unsupervised anomaly detection
- network security
- unsupervised learning
- detecting anomalous
- negative selection algorithm
- detect anomalies
- cumulative sum
- network intrusion
- machine learning
- connectionist systems
- genetic algorithm
- learning algorithm
- feature selection
- data analysis
- normal behavior
- computational intelligence
- malware detection
- text classification
- information security
- relation extraction