Predicting Cycle Time Distributions with Aggregate Modelling of Work Areas in a Real-World Wafer Fab.

Patrick C. Deenen Jelle Adan John W. Fowler

Published in: WSC (2021)

Keyphrases

real world
wide range
probability distribution
case study
random variables
data sets
data mining
synthetic data
neural network
massively parallel
integrated circuit
semiconductor manufacturing
mutual information
multi class
hidden markov models
real life
artificial neural networks
machine learning