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A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control.
Seongjin Oh
Tae-Yong Kim
Jongpil Jeong
Chae-Gyu Lee
Yongju Na
Se-Hyeon Ryu
Published in:
BCD (2023)
Keyphrases
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closed form
control strategy
control system
three dimensional
control theory
single point
control method
wafer fabrication
gaussian curvature
transformation matrix
position information
relative error
queueing networks
neural network
robotic systems
approximation algorithms
single image
learning algorithm