High-Precision Positioning Stage Control Based on a Modified Disturbance Observer.

Hui Wang Qiang Li Feng Zhou Jingxu Zhang

Published in: Sensors (2024)

Keyphrases

high precision
high recall
high reliability
control method
achieve high precision
high accuracy
control system
control theory
multiscale
data acquisition
adaptive control
database
genetic algorithm
computer vision
low cost
process control