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A Wafer Prealignment Algorithm Based on Fourier Transform and Least Square Regression.
Jiayu Xu
Hong Hu
Yulin Lei
Huaiyuan Liu
Published in:
IEEE Trans Autom. Sci. Eng. (2017)
Keyphrases
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fourier transform
detection algorithm
machine learning
fast fourier transform
fourier analysis
neural network
discrete fourier transform
image processing
computational complexity
image quality
frequency domain
image matching
fourier domain