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Design of a force-decoupled compound parallel alignment stage for high-resolution imprint lithography.
Xiantao Sun
Weihai Chen
Rui Zhou
Wenjie Chen
Jianbin Zhang
Published in:
ICRA (2014)
Keyphrases
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high resolution
software architecture
design space
information systems
image processing
website
case study
object oriented
low resolution
building blocks
database
neural network
computer vision
multiresolution
design process
parallel processing