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A Self-Resonant MEMS-based Electrostatic Field Sensor with 4V/m/Hz Sensitivity.

Tim DenisonJinbo KuangJohn S. ShafranMichael JudyKent H. Lundberg
Published in: ISSCC (2006)
Keyphrases
  • frequency band
  • high sensitivity
  • high speed
  • sensor data
  • electric field
  • sensitivity analysis
  • frame rate
  • data sets
  • real world
  • mobile robot
  • multi sensor
  • low frequency
  • image sensor
  • vision sensor