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Challenges and performance limitations of high-k and oxynitride gate dielectrics for 90/65nm CMOS technology.

S. Y. Tan
Published in: Microelectron. J. (2007)
Keyphrases
  • cmos technology
  • low power
  • spl times
  • low voltage
  • power consumption
  • parallel processing
  • power dissipation
  • image sensor
  • low cost
  • high speed
  • mixed signal
  • silicon on insulator