A genetic algorithm approach to manage ion implantation processes in wafer fabrication.
Shwu-Min HorngJohn W. FowlerJeffery K. CochranPublished in: Int. J. Manuf. Technol. Manag. (2000)
Keyphrases
- genetic algorithm
- wafer fabrication
- multi objective
- artificial neural networks
- optimization method
- genetic algorithm ga
- fitness function
- fuzzy logic
- special case
- encoding scheme
- evolutionary algorithm
- genetic programming
- optimization algorithm
- multi objective optimization
- population size
- immune genetic algorithm
- effectively manage