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A novel sensing scheme for the displacement of electrostatically actuated microcantilevers.

Mariateresa NapoliCraig OlroydBassam BamiehKimberly Turner
Published in: ACC (2005)
Keyphrases
  • real time
  • optical flow
  • polynomial time approximation
  • neural network
  • artificial intelligence
  • knowledge base
  • image compression
  • classification scheme
  • optimization scheme
  • sensor fusion