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Microsystems elements based on free-standing thick-films made with a new sacrificial layer process.
Claude Lucat
Patrick Ginet
Christophe Castille
Hélène Debéda
Francis Ménil
Published in:
Microelectron. Reliab. (2008)
Keyphrases
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database
data sets
information systems
three dimensional
relational databases
case study
image segmentation
design process