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A concentrated springs architecture for single-digit frequency symmetry in Si MEMS gyroscope.
J. Giner
Y. Zhang
T. Shiota
D. Maeda
K. Ono
Shinya Kajiyama
T. Oshima
Taizo Yamawaki
T. Sekiguchi
Published in:
IEEE SENSORS (2016)
Keyphrases
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management system
real time
neural network
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