Login / Signup

Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns.

Takashi NasunoYoshihisa MatsubaraHiromasa KobayashiAkiyuki MinamiEiichi SodaHiroshi TsudaKoichiro TsujitaWataru WakamiyaNobuyoshi Kobayashi
Published in: IEICE Trans. Electron. (2005)
Keyphrases
  • sensor networks
  • pattern analysis
  • tree structure
  • structural analysis
  • quantitative analysis
  • data analysis
  • graph structure
  • structural models
  • neural network
  • machine learning
  • case study
  • structural features