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Using genetic algorithm to optimize the dummy filling problem of the flash lamp anneal process in semiconductor manufacturing.
S. C. Lin
S. F. Liu
F. L. Chen
Published in:
J. Intell. Manuf. (2012)
Keyphrases
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semiconductor manufacturing
genetic algorithm
process control
discrete event simulation
neural network
real world
website
process model
social networks
computer vision
information systems
decision making
decision trees
reinforcement learning
multi objective
fuzzy logic